Å×¹âÒº
Å×¹âÒº
+
  • Å×¹âÒº
  • Å×¹âÒº

Å×¹âÒº

ËùÊô·ÖÀࣺ CMPÔì³Ì×ÊÁÏ

Å×¹âÒºÊÇÒ»ÖÖ¿ÅÁ£É¢²¼ÔÈÉ¢µÄ½ºÌå,¿Éʹ¹èƬ±í±í²úÉúÒ»²ãÑõ»¯Ä¤,ÔÙÓÉÅ×¹âÒºÖÐÄ¥Á£½«ÆäÈ¥³ý,´ïµ½Å×¹âÖ÷ÕÅ¡£Í¨³£Å×¹âÒºµÄÁ÷¿ì¡¢Õ³¶È¡¢Î¶ȡ¢³É·Ö¡¢pHÖµµÈ³ÇÊжÔÈ¥³ý³ÉЧÓÐÓ°Ïì¡£

²úÆ·ÏêÇé

²úÆ·²úÆ·½éÉÜ·ÖÀà¹Ø¼ü»úÄÜÃèÊö
DP53XX¡¢DP55XX¡¢DP59XXϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖжྦྷ¹èµÄÈ¥³ýºÍƽչ»¯  £¬ÓµÓи߶ྦྷ¹èÈ¥³ý¿ìÂÊ  £¬¸ßÏ¡Êͱȡ¢µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾ­ÔÚ´æ´¢Æ÷¼þÁ¿²úÖÐʹÓ᣶ྦྷ¹èÅ×¹âÒº

¹Ìº¬Á¿4%-20%£»

Á£¾¶£º60-200 nm£»

Poly/OXÒÆ³ýÑ¡Ôñ±È¸ß

DP54XX¡¢DP56XX¡¢DP58XXϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖжೡ¾°µÄµª»¯¹è±¡Ä¤È¥³ýºÍƽչ»¯  £¬ÓµÓеúÐÎЧӦ½¨¸´ÄÜÁ¦Ç¿  £¬Õ¤¼«¸ß¶È¾«×¼½ÚÔìµÄÀûÒæ  £¬ÔÚÂß¼­Æ÷¼þÔì×÷ÖÐ¿í·ºÀûÓᣵª»¯¹èÅ×¹âÒº

¹Ìº¬Á¿2%-20%£»

Á£¾¶£º50-100 nm£»

SiN/OXÒÆ³ýÑ¡Ôñ±ÈÊÊÖÐ

ZXϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнéµç²ã×ÊÁÏ£¨Ñõ»¯¹è£©µÄÈ¥³ýºÍƽչ»¯  £¬ÓµÓиßÈ¥³ý¿ìÂÊ  £¬¸ßÏ¡Êͱȡ¢µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾ­ÔÚ´æ´¢Æ÷¼þÁ¿²úÖÐʹÓ᣽éµç×ÊÁÏÅ×¹âÒº

¹Ìº¬Á¿3%-20%  £¬

Á£¾¶80-150nm  £¬

OX±¡Ä¤ÒƳýÂʸß

DP6XXXϵÁÐÔÚ¼¯³Éµç·Ôì×÷ÖÐ  £¬ÓÃÓÚ¹èÆ¬±í±í»¯Ñ§»úеÅ×¹â(CMP)  £¬ÓÐÈ¥³ý¿ìÂÊ¸ß  £¬±í±íȱµãÂʵ͵ÄÌØµã¡£¹è³Äµ×Å×¹âÒº

¹Ìº¬Á¿2%-20%£»

Á£¾¶£º50-100 nm£»

SiÒÆ³ýÂʸߣ»

¾§Ô²È±µãÂʵÍ

DW6XXXϵÁдîÔØ×Ô²úÑõ»¯ÂÁÑÐÄ¥Á£×Ó  £¬ÓÃÓÚÂß¼­Æ÷¼þÔì×÷¹¤ÒÕÖнðÊôÎÙÕ¤¼«×ÊÁϵÄÈ¥³ýºÍƽչ»¯  £¬ÓµÓÐ¸ßÆ½Õ¹»¯Ð§ÄÜ  £¬¸ßÑ¡Ôñ±È  £¬µÍȱµãÂʵÄÌØµã  £¬ÒÑÔÚÂß¼­Æ÷¼þÁ¿²úÖÐʹÓá£ÎÙÕ¤¼«Å×¹âÒº

¹Ìº¬Á¿0.01%-0.3%  £¬

Á£¾¶60-120nm  £¬W  £¬TiN  £¬OX ÒƳýÂʾù¿ÉÂú×㶨Ô컯ÐèÒª  £¬W/OX ÒƳýÑ¡Ôñ±È¸ß

DW3XXX¡¢DW5XXXϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊôÎÙ×ÊÁϵÄÈ¥³ýºÍƽչ»¯  £¬Ñ¡Ôñ±È¿É¿Ø  £¬Âú×ãÑ¡Ôñ±È¶¨ÔìÐèÒª  £¬µÍȱµãÂÊ  £¬ÒѾ­ÔÚÂß¼­Æ÷¼þÁ¿²úÖÐʹÓá£ÎÙÅ×¹âÒº

¹Ìº¬Á¿1%-10%  £¬

Á£¾¶60-100nm  £¬

W  £¬TiN  £¬OX ÒƳýÂʾù¿ÉÂú×㶨Ô컯ÐèÒª  £¬W/OX ÒƳýÑ¡Ôñ±ÈÊÊÖÐ

DBϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷Í­»¥Á¬¹¤ÒÕÖз´¶Ô²ãµÄÈ¥³ýºÍƽչ»¯  £¬Ñ¡ÔñÐÔÅ×¹âÍ­Óë·´¶Ô²ã  £¬¸ßƽ̹¶È¡¢µÍȱµã  £¬µÍÇÖÊ´»òµúÐΰ¼ÏÝ¡£Í­·´¶Ô²ãÅ×¹âÒº

¹Ìº¬Á¿5~25%  £¬

Á£¾¶20-150nm  £¬Cu  £¬OX  £¬BD  £¬Ta  £¬TaN  £¬SiNµÈ±¡Ä¤ÒƳýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ôì

DCϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊôÍ­µÄÈ¥³ýºÍƽչ»¯  £¬ÓµÓиßÈ¥³ý¿ìÂÊ  £¬¸ßÏ¡ÊÍ±È  £¬µÍȱµãµÈÌØµã¡£Í­Å×¹âÒº¹Ìº¬Á¿0.5%-2%  £¬Á£¾¶30-120nm£»CuÒÆ³ýÂʸߣ»Cu/OXÒÆ³ýÑ¡Ôñ±ÈµÍ
ZAϵÁдîÔØ×Ô²úÑõ»¯ÂÁÑÐÄ¥Á£×Ó  £¬ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊôÂÁÕ¤¼«×ÊÁϵÄÈ¥³ýºÍƽչ»¯½¨¸´  £¬ÓµÓÐ¸ßÆ½Õ¹»¯Ð§ÄÜ  £¬¸ßÑ¡Ôñ±È  £¬µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾ­ÔÚÂß¼­Æ÷¼þÔì×÷ÖÐʹÓá£ÂÁÕ¤¼«Å×¹âÒº¹Ìº¬Á¿0.5%-2%  £¬Á£¾¶60-120nm  £¬Al   £¬TiN  £¬OXµÈ±¡Ä¤ÒƳýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ôì  £¬Al/OX ÒƳýÑ¡Ôñ±È¸ß
DSϵÁдîÔØ×Ô²úÑõ»¯îæÑÐÄ¥Á£×Ó  £¬ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнéµç²ã×ÊÁÏ£¨Ñõ»¯¹è£©µÄÈ¥³ýºÍƽչ»¯  £¬STI½á¹¹µÄ¹¹½¨ÖС£ÓµÓиßÑõ»¯¹èÈ¥³ý¿ìÂÊ  £¬¸ßƽչ»¯Ð§ÄÜ¡¢µÍµúÐÎЧӦ¡¢µÍȱµãÂʵÄÌØµã¡£Ñõ»¯îæÅ×¹âÒº¹Ìº¬Á¿0.5%-5%  £¬Á£¾¶80-150nm  £¬OXÒÆ³ýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ôì  £¬OX/SiNÒÆ³ýÑ¡Ôñ±È¸ß
DLSϵÁÐCMP slurryÖеÄÖ÷ÌâÔ­ÁÏ  £¬½ðÊôÔÓÖʺ¬Á¿µÍ  £¬¿í·ºÓÃÓÚǰ¶Î¹¤ÒÕ¼°¸ßÒªÇóµÄ½ðÊô»¥Á¬¹¤ÒÕ¡£ÓµÓÐÓ²¶ÈµÍ  £¬¾§Ô²È±µãÂʵ͵ÄÌØµã¡£³¬´¿¹èÄ¥ÁϹ̺¬Á¿15%-21%  £¬Á£¾¶35-180nm£»pH 6.5~8.6£»¸÷Ïî½ðÊôÔÓÖÊ£¼20ppb£»¿É¶©ÔìÄ¥ÁÏ¿ÅÁ£Ëù´øµçºÉ
DLSBϵÁÐÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖи÷Ôì³ÌÖÐslurryÉè¼Æ  £¬Ìṩ»úеÑÐÄ¥Á¦ÒÔ¼°»¯Ñ§×é·ÖÎü¸½Î»µã  £¬¿ÉÓÃ×÷¼±¾çÈ¥³ýÓëÑ¡Ôñ±È½ÚÔì¸ßµÄ³¡¾°¡£¸ß´¿¹èÄ¥ÁϹ̺¬Á¿20-50%; Á£¾¶20~150nm; pH 8~11;ĪÊÏÓ²¶È~6

¹Ø¼ü´Ê£ºÅ×¹âÒº

ÉÏÒ»Ìõ£º Å×¹âµæ

ÏÂÒ»Ìõ£º Ï´åªÒº

Å×¹âÒº

Å×¹âÒº

Å×¹âÒºÊÇÒ»ÖÖ¿ÅÁ£É¢²¼ÔÈÉ¢µÄ½ºÌå,¿Éʹ¹èƬ±í±í²úÉúÒ»²ãÑõ»¯Ä¤,ÔÙÓÉÅ×¹âÒºÖÐÄ¥Á£½«ÆäÈ¥³ý,´ïµ½Å×¹âÖ÷ÕÅ¡£Í¨³£Å×¹âÒºµÄÁ÷¿ì¡¢Õ³¶È¡¢Î¶ȡ¢³É·Ö¡¢pHÖµµÈ³ÇÊжÔÈ¥³ý³ÉЧÓÐÓ°Ïì¡£

²úÆ·Õ÷ѯ

µç»°£º027-59881888

ÓйزúÆ·

¼¯³Éµç·×ÊÁÏ

°ëµ¼ÌåÏÔʾ×ÊÁÏ

´òÓ¡¸´Ó¡Í¨ÓúIJÄ

ÔÚÏßÁôÑÔ

ÁôÏÂÄúÏëÕ÷ѯµÄÐÅÏ¢  £¬ÎÒÃǻᾡ¿ìÁªÏµÄú

¡¾ÍøÕ¾µØÍ¼¡¿